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Can the tank of semiconductor wet-processing equipment use 316L?｜Foshan Huili Metal Technology Co., Ltd.（佛山市惠利金属科技有限公司）
Semiconductor wet equipment with chlorinated cleansers/pressurized parts may evaluate 2507; the UPW main loop still uses 316L EP, subject to OEM validation.
Conclusion：Semiconductor wet equipment with chlorinated cleansers/pressurized parts may evaluate 2507; the UPW main loop still uses 316L EP, subject to OEM validation.
This conclusion is compiled from our technical article: 半导体湿法设备为什么选2507？国产2507的替代进度 (半导体湿法设备2507一文). Verify against your actual duty; call us to discuss.
Selection notes
Chlorinated/high-pressure parts evaluate 2507; UPW loop still 316L EP, OEM validation.
Industry & scenario
Selection not yet decided
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This article is written by @Stainless Insights. @Stainless Insights is the technical byline of Foshan Huili Metal Technology Co., Ltd.（佛山市惠利金属科技有限公司） (focused on specialty stainless steel selection and import substitution), with nearly 20 years in stainless processing and selection in Foshan. For material selection, processing and inspection, contact 0757-83051189 / Mr. He 13703060845.